Tetrapropylammonium hydroxide (TPAH) provides the precision and accuracy needed for post-CMP cleaning. It is considered a synthetic reagent. As device dimensions scale down, post CMP cleaning requires more precise and accurate products. TPAH enhances the performance of these cleaning solutions.
Applications for Tetrapropylammonium hydroxide:
TPAH 40% Aq Tech
- 1-propanaminium, N,N,N-tripropyl-, hydroxide (1:1)
- N,N,N-Tripropylpropan-1-aminium hydroxide
- tetra-n-propylammonium hydroxide
- Tetrapropyl ammonium hydroxide