Tetrapropylammonium Hydroxide (TPAH)

TetrapropylPost-cmp cleaningammonium hydroxide (TPAH) provides the precision and accuracy needed for post-CMP cleaning.  It is considered a synthetic reagent. As device dimensions scale down, post CMP cleaning requires more precise and accurate products. Tetrapropylammonium hydroxideTPAH enhances the performance of these cleaning solutions.

Applications for Tetrapropylammonium hydroxide:

Available Products
Tetrapropylammonium Hydroxide, 40%, Aqueous Tech Grade
TPAH 40% Aq Tech
CAS# 4499-86-9


  • 1-propanaminium, N,N,N-tripropyl-, hydroxide (1:1)
  • N,N,N-Tripropylpropan-1-aminium hydroxide
  • tetra-n-propylammonium hydroxide
  • Tetrapropyl ammonium hydroxide
"Tetrapropylammonium Hydroxide (TPAH)"