{"id":10317,"date":"2012-09-07T17:50:00","date_gmt":"2012-09-07T17:50:00","guid":{"rendered":"http:\/\/sacheminc.com\/%e8%a7%a3%e6%b1%ba%e6%96%b9%e6%a1%88\/ic-development\/"},"modified":"2018-03-08T12:18:58","modified_gmt":"2018-03-08T18:18:58","slug":"%e5%85%89%e9%98%bb%e5%8a%91-envure-dv","status":"publish","type":"page","link":"https:\/\/www.sacheminc.com\/zh-hant\/electronic-materials\/%e5%8d%8a%e5%b0%8e%e9%ab%94%e5%8c%96%e5%ad%b8%e5%93%81-envure\/%e5%85%89%e9%98%bb%e5%8a%91-envure-dv\/","title":{"rendered":"\u5149\u963b\u5291 | Envure DV\u2122"},"content":{"rendered":"<p align=\"left\"><b><i>\u5149\u963b\u5291\u61c9\u7528\u7684\u914d\u65b9\u6210\u5206<\/i><\/b><\/p>\n<p align=\"left\">20 \u591a\u5e74\u4ee5\u4f86\uff0cSACHEM \u4e00\u76f4\u662f\u7528\u65bc\u96fb\u5b50\u61c9\u7528\u7684\u986f\u5f71\u5291\u96fb\u5b50\u914d\u65b9\u6210\u5206\u7684\u9818\u5148\u4f9b\u61c9\u5546\u3002\u5927\u90e8\u5206\u986f\u5f71\u5291\u5df2\u4f7f\u7528<a title=\"\u56db\u7532\u57fa\u6c2b\u6c27\u5316\u92a8 (TMAH)\" href=\"\/?page_id=10497\">\u56db\u7532\u57fa\u6c2b\u6c27\u5316\u92a8 (TMAH) <\/a>\u548c<a title=\"\u56db\u4e01\u57fa\u6c2b\u6c27\u5316\u92a8 (TBAH)\" href=\"\/?page_id=10465\">\u56db\u4e01\u57fa\u6c2b\u6c27\u5316\u92a8 (TBAH) <\/a>\u89e3\u6c7a\u3002SACHEM \u5df2\u958b\u767c\u51fa Envure DV\u2122 \u4ee5\u5e6b\u52a9\u6eff\u8db3\u96fb\u5b50\u884c\u696d\u65e5\u76ca\u589e\u9577\u7684\u6027\u80fd\u3001\u5b89\u5168\u548c\u54c1\u8cea\u6a19\u6e96\u3002<\/p>\n<p align=\"left\"><b>Envure DV\u2122<\/b> \u6210\u5206\u53ef\u4ee5\u5e6b\u52a9\u89e3\u6c7a\u5c0f\u578b\u5c3a\u5bf8\u5e36\u4f86\u7684\u65b0\u6311\u6230\uff0c\u5982\u523b\u7dda\u908a\u7de3\u7c97\u7cd9\u5ea6\u548c\u5716\u6848\u50be\u584c\uff08\u4e0b\u9762\u662f\u53c3\u8003\u6587\u737b\uff09\u3002<\/p>\n<ul>\n<li><b>Envure DV\u2122 322<\/b><\/li>\n<li><b>Envure DV\u2122 324\u00a0<\/b><\/li>\n<li><b>Envure DV\u2122 4551<\/b><\/li>\n<li><b>Envure DV\u2122 520<\/b><\/li>\n<\/ul>\n<p align=\"left\"><b>Envure DV\u2122 322<\/b><br \/>\n\u986f\u5f71\u5291\u914d\u65b9<br \/>\n\u56db\u7532\u57fa\u6c2b\u6c27\u5316\u92a8 (TMAH)\uff0c\u542b\u6c34 25%<br \/>\nCAS# 75-59-2<br \/>\n[sachem_product:322A]<\/p>\n<p align=\"left\"><b>Envure DV\u2122 324<\/b><br \/>\n\u986f\u5f71\u5291\u914d\u65b9<br \/>\n\u56db\u7532\u57fa\u6c2b\u6c27\u5316\u92a8 (TMAH)\uff0c\u6700\u591a\u542b\u6c34 24.9%<br \/>\nCAS# 75-59-2<br \/>\n[sachem_product:324B]<\/p>\n<p align=\"left\"><b>Envure DV\u2122 4551<\/b><br \/>\n\u986f\u5f71\u5291\u914d\u65b9<br \/>\n\u56db\u4e01\u57fa\u6c2b\u6c27\u5316\u92a8 (TBAH)\uff0c\u6700\u591a\u542b\u6c34 10%<br \/>\nCAS# 2052-49-5<br \/>\n[sachem_product:4551A]<\/p>\n<p align=\"left\"><b>Envure DV\u2122 520<\/b><br \/>\n\u986f\u5f71\u5291\u914d\u65b9<br \/>\n\u56db\u7532\u57fa\u6c2b\u6c27\u5316\u92a8 (TMAH)\uff0c\u6700\u591a\u542b\u6c34 20%<br \/>\nCAS# 75-59-2<br \/>\n[sachem_product:520C]<\/p>\n<p align=\"left\">\u6b64\u5916\uff0cSACHEM \u63d0\u4f9b\u4ee5\u4e0b\u652f\u63f4\u670d\u52d9\uff1a<\/p>\n<ul>\n<li><a title=\"\u56db\u7532\u57fa\u6c2b\u6c27\u5316\u92a8\u5b89\u5168\u670d\u52d9\" href=\"\/?page_id=10513\"><b>SACHEM \u5b89\u5168\u7c21\u5831\u548c\u8aee\u8a62<\/b><\/a><\/li>\n<li><a title=\"\u81ea\u8a02\u88fd\u9020\u3001\u8abf\u914d\u8207\u6536\u8cbb\u670d\u52d9\" href=\"\/?page_id=9517\"><b>SACHEM \u8abf\u914d\u548c\u6536\u8cbb\u670d\u52d9<\/b><\/a><\/li>\n<li><a title=\"Mobius System \u00ae \u5316\u5b78\u56de\u6536\" href=\"\/?page_id=9785\"><b>Mobius System\u00ae \u56de\u6536\u670d\u52d9<\/b><\/a><\/li>\n<li><a title=\"\u65b0\u4e00\u4ee3\u56db\u7532\u57fa\u6c2b\u6c27\u5316\u92a8\u66ff\u4ee3\u7269\" href=\"\/?page_id=10273\"><b>\u9ad8\u6027\u80fd\u7522\u54c1\u66ff\u4ee3\u7269<\/b><\/a><\/li>\n<\/ul>\n<p align=\"left\"><b>\u53c3\u8003\u6587\u737b<\/b><b><\/b><\/p>\n<p align=\"left\"><a href=\"https:\/\/c.na8.content.force.com\/servlet\/servlet.FileDownload?file=00PC000000D98FT\">Development Status of EUV Resist Materials and Processing at Selete (Kentaro Matsunaga et al., 2011)<\/a><\/p>\n<p align=\"left\">Selete \u7814\u767c\u5c08\u6848\u8a55\u4f30\u4e86\u6975\u7aef\u9060\u7d2b\u5916 (EUV) \u5149\u523b\u5de5\u85dd\u7528\u65bc\u88fd\u9020\u534a\u5c0e\u9ad4\u88dd\u7f6e\u7684\u53ef\u884c\u6027\u3002\u8a72\u5718\u968a\u9084\u900f\u904e\u4f7f\u7528\u7528\u65bc HP-2X-\u5948\u7c73\u6e2c\u8a66\u6676\u7247\u8a55\u4f30\u7684 Selete \u6a19\u6e96\u5149\u523b\u81a0 (SSR) \u8a55\u4f30\u4e86\u5149\u523b\u81a0\u8655\u7406\u3002\u5728\u958b\u767c\u904e\u7a0b\u7684\u8a55\u4f30\u4e2d\uff0c\u4f7f\u7528\u56db\u7532\u57fa\u6c2b\u6c27\u5316\u92a8\u548c\u56db\u4e01\u57fa\u6c2b\u6c27\u5316\u92a8\u986f\u5f71\u6db2\u5c0d\u5149\u523b\u81a0 (SSR) \u9032\u884c\u4e86\u8a55\u4f30\u3002\u56db\u4e01\u57fa\u6c2b\u6c27\u5316\u92a8 (TBAH) \u986f\u5f71\u6db2\u548c\u6e05\u6d17\u6db2\u66ff\u4ee3\u7269\u7684\u7d50\u5408\u4f7f\u7528\u8b49\u660e\u4e86\u9810\u9632\u5716\u6848\u50be\u584c\u4e2d\u7684\u986f\u8457\u6539\u5584\u3002<\/p>\n<p align=\"left\"><a href=\"https:\/\/c.na8.content.force.com\/servlet\/servlet.FileDownload?file=00PC000000D98Dt\">Development of Resist Material and Process for hp-2x-nm Devices Using EUV Lithography (Kentaro Matsunaga et al., Selete 2010)<\/a><\/p>\n<p align=\"left\">\u6975\u7aef\u9060\u7d2b\u5916 (EUV) \u5149\u523b\u662f\u751f\u7522 hp-22-\u5948\u7c73\u6280\u8853\u7bc0\u9ede\u53ca\u4ee5\u5f8c\u7684\u534a\u5c0e\u9ad4\u88dd\u7f6e\u7684\u4e3b\u8981\u5099\u9078\u3002Selete \u9805\u76ee\u6db5\u84cb\u7528\u65bc\u6975\u7aef\u9060\u7d2b\u5916 (EUV) \u5149\u523b\u5de5\u85dd\u4e4b\u88fd\u9020\u7684\u8a55\u4f30\u3002\u4f7f\u7528\u6975\u7aef\u9060\u7d2b\u59161 \u5168\u5340\u57df\u66dd\u5149\u5de5\u5177\u7522\u751f\u7684 hp-2x-\u5948\u7c73\u6e2c\u8a66\u6676\u7247\u5206\u6790\u986f\u793a\u5149\u523b\u81a0\u7684\u6027\u80fd\u5c1a\u672a\u6eff\u8db3\u89e3\u6790\u5ea6\u9650\u5236\u3001\u9748\u654f\u5ea6\u4ee5\u53ca\u523b\u7dda\u908a\u7de3\u7c97\u7cd9\u5ea6\u7684\u56b4\u683c\u8981\u6c42\u3002\u5716\u6848\u50be\u584c\u9650\u5236\u89e3\u6790\u5ea6\u5230 hp 28 \u5948\u7c73\u3002\u82e5\u8981\u63d0\u9ad8\u89e3\u6790\u5ea6\uff0c\u9700\u8981\u6700\u4f73\u5316\u8a72\u5de5\u85dd\u4ee5\u9632\u6b62\u5716\u6848\u50be\u584c\u3002\u5c0d\u7528\u65bc hp-2x-\u5948\u7c73 \u4e00\u4ee3\u7684 Selete \u6a19\u6e96\u5149\u523b\u81a0 4 (SSR4) \u7684\u8a55\u4f30\u986f\u793a\u66f4\u8584\u7684\u5149\u523b\u81a0\u4ee5\u53ca\u4f7f\u7528\u56db\u4e01\u57fa\u6c2b\u6c27\u5316\u92a8\u986f\u5f71\u6db2\u53ef\u4ee5\u6709\u6548\u7de9\u89e3\u6b64\u554f\u984c\u3002<\/p>\n<p align=\"left\"><a href=\"https:\/\/c.na8.content.force.com\/servlet\/servlet.FileDownload?file=00PC000000D98FJ\">Dissolution Behavior of Photoresists:An In-situ Analysis (Toshiro Itani and Julius Joseph Santillan, Journal of Photopolymer Science and Technology Vol. 23, No. 5, 639-642 (2010))<\/a><\/p>\n<p align=\"left\">\u5df2\u591a\u6b21\u8abf\u67e5\u7814\u7a76\u66dd\u5149\u5f8c\u7684\u5149\u523b\u81a0\u6eb6\u89e3\u5de5\u85dd\u7279\u6027\uff0c\u4ee5\u5c0b\u627e\u5728\u958b\u767c\u6700\u7406\u60f3\u7684\u5149\u523b\u81a0\u6750\u6599\u548c\u5de5\u85dd\u4ee5\u6eff\u8db3\u4e0b\u4e00\u4ee3\u5149\u523b\u8981\u6c42\u7684\u904e\u7a0b\u4e2d\u7684\u53ef\u80fd\u7684\u7dda\u7d22\u3002\u5728\u672c\u6587\u4e2d\uff0c\u4f5c\u8005\u5229\u7528\u9ad8\u901f\u539f\u5b50\u529b\u986f\u5fae\u6280\u8853\u5c0d\u5149\u523b\u81a0\u6eb6\u89e3\u884c\u70ba\u9032\u884c\u4e86\u7684\u73fe\u5834\u5206\u6790\u3002\u5728\u958b\u767c\u904e\u7a0b\u4e4b\u524d\u3001\u671f\u9593\u548c\u4e4b\u5f8c\u5c0d\u66dd\u5149\u7684\u6975\u7aef\u9060\u7d2b\u5916\u5149\u523b\u81a0\u819c\u8868\u660e\u7684\u7269\u7406\u8b8a\u5316\u9032\u884c\u4e86\u5373\u6642\u89c0\u5bdf\u3002\u5728\u672c\u6587\u4e2d\uff0c\u4f5c\u8005\u4f9d\u7167\u6975\u7aef\u9060\u7d2b\u5916\u5149\u523b\u81a0\u5e73\u81fa\u5c0d\u56db\u7532\u57fa\u6c2b\u6c27\u5316\u92a8\u986f\u5f71\u5291\u4e2d\u7684\u6eb6\u89e3\u7279\u6027\u9032\u884c\u4e86\u6bd4\u8f03\u3002\u6b64\u5916\uff0c\u4f5c\u8005\u9084\u4f7f\u7528\u76f8\u540c\u7684\u805a\u5408\u7269\u5149\u523b\u81a0\u5206\u6790\u4e86\u56db\u7532\u57fa\u6c2b\u6c27\u5316\u92a8\u986f\u5f71\u5291\u8207\u56db\u4e01\u57fa\u6c2b\u6c27\u5316\u92a8\u986f\u5f71\u5291\u4e4b\u9593\u7684\u6eb6\u89e3\u7279\u6027\u5dee\u7570\u3002<\/p>\n<p align=\"left\"><a href=\"https:\/\/c.na8.content.force.com\/servlet\/servlet.FileDownload?file=00PC000000D98FE\">The Emergence of Alternative Developers for Extreme Ultraviolet Lithography (Toshiro Itani and Julius Joseph Santillan, Applied Physics Express 3 (2010))<\/a><\/p>\n<p align=\"left\">\u8fd1\u671f\u95dc\u65bc\u6975\u7aef\u9060\u7d2b\u5916\u5149\u523b\u81a0\u7684\u5de5\u4f5c\u986f\u793a\u63a1\u7528\u8655\u7406\u904e\u7684\u5149\u523b\u81a0\u66ff\u4ee3\u7269\u4f5c\u70ba\u9054\u5230\u5149\u523b\u6027\u80fd\u76ee\u6a19\u7684\u53ef\u80fd\u7684\u89e3\u6c7a\u65b9\u6848\u3002\u5728\u672c\u7814\u7a76\u4e2d\uff0c\u4f5c\u8005\u8abf\u67e5\u7814\u7a76\u4e86\u56db\u4e01\u57fa\u6c2b\u6c27\u5316\u92a8\u66ff\u4ee3\u76ee\u524d\u4f7f\u7528\u7684\u56db\u7532\u57fa\u6c2b\u6c27\u5316\u92a8\u986f\u5f71\u6db2\u7684\u53ef\u80fd\u6027\u3002\u4f7f\u7528\u56db\u4e01\u57fa\u6c2b\u6c27\u5316\u92a8\u986f\u5f71\u5291\u53ef\u4ee5\u5be6\u73fe\u5149\u523b\u6027\u80fd\u7684\u986f\u8457\u6539\u5584\u3002<\/p>\n<p align=\"left\"><a href=\"https:\/\/c.na8.content.force.com\/servlet\/servlet.FileDownload?file=00PC000000D98F9\">Alternative Developer Solutions for Extreme Ultraviolet Resist (Toshiro Itani and Julius Joseph Santillan, 2009)<\/a><\/p>\n<p align=\"left\">\u56db\u4e19\u57fa\u6c2b\u6c27\u5316\u92a8\u548c\u56db\u4e01\u57fa\u6c2b\u6c27\u5316\u92a8\u542b\u6c34\u986f\u5f71\u6db2\u88ab\u63d0\u8b70\u4f5c\u70ba\u56db\u7532\u57fa\u6c2b\u6c27\u5316\u92a8\u542b\u6c34\u986f\u5f71\u6db2\u7684\u66ff\u4ee3\u7269\u4f7f\u7528\uff08\u534a\u5c0e\u9ad4\u884c\u696d\u6a19\u6e96\uff09\u3002\u6975\u7aef\u9060\u7d2b\u5916\u5149\u523b\u81a0\u4f7f\u7528\u56db\u7532\u57fa\u6c2b\u6c27\u5316\u92a8\u3001\u56db\u4e19\u57fa\u6c2b\u6c27\u5316\u92a8\u548c\u56db\u4e01\u57fa\u6c2b\u6c27\u5316\u92a8\u986f\u5f71\u6db2\u7684\u6eb6\u89e3\u5c0d\u6bd4\u66f2\u7dda\u5df2\u986f\u793a\u51fa\u76f8\u4f3c\u7684\u6eb6\u89e3\u7279\u6027\uff0c\u9019\u8868\u660e\u4f7f\u7528\u9019\u4e9b\u986f\u5f71\u6db2\u66ff\u4ee3\u7269\u5c0d\u5149\u523b\u81a0\u89e3\u6790\u5ea6\u9650\u5236\u548c\u9748\u654f\u5ea6\u7684\u5f71\u97ff\u6975\u5c0f\u3002\u6210\u50cf\u6027\u80fd\u5206\u6790\u7d50\u679c\u986f\u793a\u4e86\u5728\u89e3\u6790\u5ea6\u6027\u80fd\u548c\u654f\u611f\u5ea6\u4e0a\u7684\u5fae\u4e0d\u8db3\u9053\u7684\u5f71\u97ff\u3002\u64da\u89c0\u5bdf\uff0c\u4f7f\u7528\u56db\u4e01\u57fa\u6c2b\u6c27\u5316\u92a8\u548c\u6a19\u6e96\u56db\u7532\u57fa\u6c2b\u6c27\u5316\u92a8\u986f\u5f71\u6db2\u6539\u5584\u4e86 20% \u7684 LWR\u3002\u76f8\u5c0d\u65bc\u4f7f\u7528\u56db\u4e01\u57fa\u6c2b\u6c27\u5316\u92a8\u986f\u5f71\u6db2\u800c\u8a00\uff0c\u9019\u7a2e\u6539\u5584\u88ab\u8a8d\u70ba\u662f\u6eb6\u89e3\u4e2d\u986f\u8457\u589e\u9577\u7684\u7d50\u679c\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u5149\u963b\u5291\u61c9\u7528\u7684\u914d\u65b9\u6210\u5206 20 \u591a\u5e74\u4ee5\u4f86\uff0cSACHEM \u4e00\u76f4\u662f\u7528\u65bc\u96fb\u5b50\u61c9\u7528\u7684\u986f\u5f71\u5291\u96fb\u5b50\u914d\u65b9\u6210\u5206\u7684\u9818\u5148\u4f9b\u61c9\u5546\u3002\u5927\u90e8\u5206 &hellip;<\/p>\n","protected":false},"author":43,"featured_media":0,"parent":9047,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-10317","page","type-page","status-publish","hentry","no-thumb"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.sacheminc.com\/zh-hant\/wp-json\/wp\/v2\/pages\/10317","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sacheminc.com\/zh-hant\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.sacheminc.com\/zh-hant\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.sacheminc.com\/zh-hant\/wp-json\/wp\/v2\/users\/43"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sacheminc.com\/zh-hant\/wp-json\/wp\/v2\/comments?post=10317"}],"version-history":[{"count":0,"href":"https:\/\/www.sacheminc.com\/zh-hant\/wp-json\/wp\/v2\/pages\/10317\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.sacheminc.com\/zh-hant\/wp-json\/wp\/v2\/pages\/9047"}],"wp:attachment":[{"href":"https:\/\/www.sacheminc.com\/zh-hant\/wp-json\/wp\/v2\/media?parent=10317"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}