{"id":10316,"date":"2012-09-07T17:50:00","date_gmt":"2012-09-07T17:50:00","guid":{"rendered":"http:\/\/sacheminc.com\/%e8%a7%a3%e5%86%b3%e6%96%b9%e6%a1%88\/ic-development\/"},"modified":"2018-11-12T16:13:01","modified_gmt":"2018-11-12T22:13:01","slug":"%e5%85%89%e9%98%bb%e5%89%82-envure-dv","status":"publish","type":"page","link":"https:\/\/www.sacheminc.com\/zh-hans\/electronic-materials\/%e5%8d%8a%e5%af%bc%e4%bd%93%e5%8c%96%e5%ad%a6%e5%93%81-envure\/%e5%85%89%e9%98%bb%e5%89%82-envure-dv\/","title":{"rendered":"\u5149\u963b\u5242 | Envure DV\u2122"},"content":{"rendered":"<p align=\"left\"><b><i>\u5149\u963b\u5242\u5e94\u7528\u7684\u914d\u65b9\u6210\u5206<\/i><\/b><\/p>\n<p align=\"left\">20 \u591a\u5e74\u4ee5\u6765\uff0cSACHEM \u4e00\u76f4\u662f\u7528\u4e8e\u7535\u5b50\u5e94\u7528\u7684\u663e\u5f71\u5242\u7535\u5b50\u914d\u65b9\u6210\u5206\u7684\u9886\u5148\u4f9b\u5e94\u5546\u3002\u5927\u90e8\u5206\u663e\u5f71\u5242\u5df2\u4f7f\u7528<a title=\"\u56db\u7532\u57fa\u6c22\u6c27\u5316\u94f5 (TMAH)\" href=\"\/?page_id=10496\">\u56db\u7532\u57fa\u6c22\u6c27\u5316\u94f5 (TMAH)<\/a> \u548c<a title=\"\u56db\u4e01\u57fa\u6c22\u6c27\u5316\u94f5 (TBAH)\" href=\"\/?page_id=10464\">\u56db\u4e01\u57fa\u6c22\u6c27\u5316\u94f5 (TBAH)<\/a> \u89e3\u51b3\u3002SACHEM \u5df2\u5f00\u53d1\u51fa Envure DV\u2122 \u4ee5\u5e2e\u52a9\u6ee1\u8db3\u7535\u5b50\u884c\u4e1a\u65e5\u76ca\u589e\u957f\u7684\u6027\u80fd\u3001\u5b89\u5168\u548c\u8d28\u91cf\u6807\u51c6\u3002<\/p>\n<p align=\"left\"><b>Envure DV\u2122<\/b> \u6210\u5206\u53ef\u4ee5\u5e2e\u52a9\u89e3\u51b3\u5c0f\u578b\u5c3a\u5bf8\u5e26\u6765\u7684\u65b0\u6311\u6218\uff0c\u5982\u523b\u7ebf\u8fb9\u7f18\u7c97\u7cd9\u5ea6\u548c\u56fe\u6848\u5012\u7ebf\uff08\u4e0b\u9762\u662f\u53c2\u8003\u6587\u732e\uff09\u3002<\/p>\n<ul>\n<li><b>Envure DV\u2122 322<\/b><\/li>\n<li><b>Envure DV\u2122 324\u00a0<\/b><\/li>\n<li><b>Envure DV\u2122 4551<\/b><\/li>\n<li><b>Envure DV\u2122 520<\/b><\/li>\n<\/ul>\n<p align=\"left\"><b>Envure DV\u2122 322<\/b><br \/>\n\u663e\u5f71\u5242\u914d\u65b9<br \/>\n\u56db\u7532\u57fa\u6c22\u6c27\u5316\u94f5 (TMAH) \u542b\u6c34 25%<br \/>\nCAS# 75-59-2<br \/>\n[sachem_product:322A]<\/p>\n<p align=\"left\"><b>Envure DV\u2122 324<\/b><br \/>\n\u663e\u5f71\u5242\u914d\u65b9<br \/>\n\u56db\u7532\u57fa\u6c22\u6c27\u5316\u94f5 (TMAH)\uff0c\u6700\u591a\u542b\u6c34 24.9%<br \/>\nCAS# 75-59-2<br \/>\n[sachem_product:324B]<\/p>\n<p align=\"left\"><b>Envure DV\u2122 4551<\/b><br \/>\n\u663e\u5f71\u5242\u914d\u65b9<br \/>\n\u56db\u4e01\u57fa\u6c22\u6c27\u5316\u94f5 (TBAH)\uff0c\u6700\u591a\u542b\u6c34 10%<br \/>\nCAS# 2052-49-5<br \/>\n[sachem_product:4551A]<\/p>\n<p align=\"left\"><b>Envure DV\u2122 520<\/b><br \/>\n\u663e\u5f71\u5242\u914d\u65b9<br \/>\n\u56db\u7532\u57fa\u6c22\u6c27\u5316\u94f5 (TMAH)\uff0c\u6700\u591a\u542b\u6c34 20%<br \/>\nCAS# 75-59-2<br \/>\n[sachem_product:520C]<\/p>\n<p align=\"left\">\u6b64\u5916\uff0cSACHEM \u63d0\u4f9b\u4ee5\u4e0b\u652f\u6301\u670d\u52a1\uff1a<\/p>\n<ul>\n<li><a title=\"TMAH \u5b89\u5168\u670d\u52a1\" href=\"\/?page_id=9009\"><b>SACHEM \u5b89\u5168\u7b80\u62a5\u548c\u54a8\u8be2<\/b><\/a><\/li>\n<li><a title=\"\u81ea\u5b9a\u4e49\u5236\u9020\u3001\u8c03\u914d\u548c\u6536\u8d39\u670d\u52a1\" href=\"\/?page_id=9006\"><b>SACHEM \u8c03\u914d\u548c\u6536\u8d39\u670d\u52a1<\/b><\/a><\/li>\n<li><a title=\"Mobius System \u00ae \u5316\u5b66\u56de\u6536\" href=\"\/?page_id=9003\"><b>Mobius System\u00ae \u56de\u6536\u670d\u52a1<\/b><\/a><\/li>\n<li><a title=\"\u65b0\u4e00\u4ee3\u56db\u7532\u57fa\u6c22\u6c27\u5316\u94f5\u66ff\u4ee3\u7269\" href=\"\/?page_id=10272\"><b>\u9ad8\u6027\u80fd\u4ea7\u54c1\u66ff\u4ee3\u7269<\/b><\/a><\/li>\n<\/ul>\n<p align=\"left\"><b>\u53c2\u8003\u6587\u732e<\/b><b><\/b><\/p>\n<p align=\"left\"><a href=\"https:\/\/c.na8.content.force.com\/servlet\/servlet.FileDownload?file=00PC000000D98FT\">Development Status of EUV Resist Materials and Processing at Selete (Kentaro Matsunaga et al., 2011)<\/a><\/p>\n<p align=\"left\">Selete \u7814\u53d1\u9879\u76ee\u8bc4\u4f30\u4e86\u6781\u7aef\u8fdc\u7d2b\u5916 (EUV) \u5149\u523b\u5de5\u827a\u7528\u4e8e\u5236\u9020\u534a\u5bfc\u4f53\u8bbe\u5907\u7684\u53ef\u884c\u6027\u3002\u8be5\u56e2\u961f\u8fd8\u901a\u8fc7\u4f7f\u7528\u7528\u4e8e HP-2X-\u7eb3\u7c73\u6d4b\u8bd5\u82af\u7247\u8bc4\u4f30\u7684 Selete \u6807\u51c6\u5149\u523b\u80f6 (SSR) \u8bc4\u4f30\u4e86\u5149\u523b\u80f6\u5904\u7406\u3002\u5728\u5f00\u53d1\u8fc7\u7a0b\u7684\u8bc4\u4f30\u4e2d\uff0c\u4f7f\u7528\u56db\u7532\u57fa\u6c22\u6c27\u5316\u94f5\u548c\u56db\u4e01\u57fa\u6c22\u6c27\u5316\u94f5\u663e\u5f71\u6db2\u5bf9\u5149\u523b\u80f6 (SSR) \u8fdb\u884c\u4e86\u8bc4\u4f30\u3002\u56db\u4e01\u57fa\u6c22\u6c27\u5316\u94f5 (TBAH) \u663e\u5f71\u6db2\u548c\u6e05\u6d17\u6db2\u66ff\u4ee3\u7269\u7684\u7ed3\u5408\u4f7f\u7528\u8bc1\u660e\u4e86\u9884\u9632\u56fe\u6848\u5012\u7ebf\u4e2d\u7684\u663e\u8457\u6539\u5584\u3002<\/p>\n<p align=\"left\"><a href=\"https:\/\/c.na8.content.force.com\/servlet\/servlet.FileDownload?file=00PC000000D98Dt\">Development of Resist Material and Process for hp-2x-nm Devices Using EUV Lithography (Kentaro Matsunaga et al., Selete 2010)<\/a><\/p>\n<p align=\"left\">\u6781\u7aef\u8fdc\u7d2b\u5916 (EUV) \u5149\u523b\u662f\u751f\u4ea7 hp-22-\u7eb3\u7c73\u6280\u672f\u8282\u70b9\u53ca\u4ee5\u540e\u7684\u534a\u5bfc\u4f53\u8bbe\u5907\u7684\u4e3b\u8981\u5907\u9009\u3002Selete \u9879\u76ee\u6db5\u76d6\u7528\u4e8e\u6781\u7aef\u8fdc\u7d2b\u5916 (EUV) \u5149\u523b\u5de5\u827a\u4e4b\u5236\u9020\u7684\u8bc4\u4f30\u3002\u4f7f\u7528\u6781\u7aef\u8fdc\u7d2b\u59161 \u5168\u533a\u57df\u66dd\u5149\u5de5\u5177\u4ea7\u751f\u7684 hp-2x-\u7eb3\u7c73\u6d4b\u8bd5\u82af\u7247\u5206\u6790\u663e\u793a\u5149\u523b\u80f6\u7684\u6027\u80fd\u5c1a\u672a\u6ee1\u8db3\u5206\u8fa8\u7387\u9650\u5236\u3001\u7075\u654f\u5ea6\u4ee5\u53ca\u523b\u7ebf\u8fb9\u7f18\u7c97\u7cd9\u5ea6\u7684\u4e25\u683c\u8981\u6c42\u3002\u56fe\u5f62\u5012\u7ebf\u9650\u5236\u5206\u8fa8\u7387\u81f3 hp 28 \u7eb3\u7c73\u3002\u82e5\u8981\u63d0\u9ad8\u5206\u8fa8\u7387\uff0c\u9700\u8981\u4f18\u5316\u8be5\u5de5\u827a\u4ee5\u9632\u6b62\u56fe\u5f62\u5012\u7ebf\u3002\u5bf9\u7528\u4e8e hp-2x-\u7eb3\u7c73\u4e00\u4ee3\u7684 Selete \u6807\u51c6\u5149\u523b\u80f6 4 (SSR4) \u7684\u8bc4\u4f30\u663e\u793a\u66f4\u8584\u7684\u5149\u523b\u80f6\u4ee5\u53ca\u4f7f\u7528\u56db\u4e01\u57fa\u6c22\u6c27\u5316\u94f5\u663e\u5f71\u6db2\u53ef\u4ee5\u6709\u6548\u7f13\u89e3\u6b64\u95ee\u9898\u3002<\/p>\n<p align=\"left\"><a href=\"https:\/\/c.na8.content.force.com\/servlet\/servlet.FileDownload?file=00PC000000D98FJ\">Dissolution Behavior of Photoresists:An In-situ Analysis (Toshiro Itani and Julius Joseph Santillan, Journal of Photopolymer Science and Technology Vol. 23, No. 5, 639-642 (2010))<\/a><\/p>\n<p align=\"left\">\u5df2\u591a\u6b21\u8c03\u67e5\u7814\u7a76\u66dd\u5149\u540e\u7684\u5149\u523b\u80f6\u6eb6\u89e3\u5de5\u827a\u7279\u6027\uff0c\u4ee5\u5bfb\u627e\u5728\u5f00\u53d1\u6700\u7406\u60f3\u7684\u5149\u523b\u80f6\u6750\u6599\u548c\u5de5\u827a\u4ee5\u6ee1\u8db3\u4e0b\u4e00\u4ee3\u5149\u523b\u8981\u6c42\u7684\u8fc7\u7a0b\u4e2d\u53ef\u80fd\u7684\u7ebf\u7d22\u3002\u5728\u672c\u6587\u4e2d\uff0c\u4f5c\u8005\u5229\u7528\u9ad8\u901f\u539f\u5b50\u529b\u663e\u5fae\u6280\u672f\u5bf9\u5149\u523b\u80f6\u6eb6\u89e3\u884c\u4e3a\u8fdb\u884c\u4e86\u73b0\u573a\u5206\u6790\u3002\u5728\u5f00\u53d1\u8fc7\u7a0b\u4e4b\u524d\u3001\u671f\u95f4\u548c\u4e4b\u540e\u5bf9\u66dd\u5149\u7684\u6781\u7aef\u8fdc\u7d2b\u5916\u5149\u523b\u80f6\u819c\u8868\u660e\u7684\u7269\u7406\u53d8\u5316\u8fdb\u884c\u4e86\u5b9e\u65f6\u89c2\u5bdf\u3002\u5728\u672c\u6587\u4e2d\uff0c\u4f5c\u8005\u4f9d\u7167\u6781\u7aef\u8fdc\u7d2b\u5916\u5149\u523b\u80f6\u5e73\u53f0\u5bf9\u56db\u7532\u57fa\u6c22\u6c27\u5316\u94f5\u663e\u5f71\u5242\u4e2d\u7684\u6eb6\u89e3\u7279\u6027\u8fdb\u884c\u4e86\u6bd4\u8f83\u3002\u6b64\u5916\uff0c\u4f5c\u8005\u8fd8\u4f7f\u7528\u76f8\u540c\u7684\u805a\u5408\u7269\u5149\u523b\u80f6\u5206\u6790\u4e86\u56db\u7532\u57fa\u6c22\u6c27\u5316\u94f5\u663e\u5f71\u5242\u4e0e\u56db\u4e01\u57fa\u6c22\u6c27\u5316\u94f5\u663e\u5f71\u5242\u4e4b\u95f4\u7684\u6eb6\u89e3\u7279\u6027\u5dee\u5f02\u3002<\/p>\n<p align=\"left\"><a href=\"https:\/\/c.na8.content.force.com\/servlet\/servlet.FileDownload?file=00PC000000D98FE\">The Emergence of Alternative Developers for Extreme Ultraviolet Lithography (Toshiro Itani and Julius Joseph Santillan, Applied Physics Express 3 (2010))<\/a><\/p>\n<p align=\"left\">\u8fd1\u671f\u5173\u4e8e\u6781\u7aef\u8fdc\u7d2b\u5916\u5149\u523b\u80f6\u7684\u5de5\u4f5c\u663e\u793a\u91c7\u7528\u5904\u7406\u8fc7\u7684\u5149\u523b\u80f6\u66ff\u4ee3\u7269\u4f5c\u4e3a\u8fbe\u5230\u5149\u523b\u6027\u80fd\u76ee\u6807\u7684\u53ef\u80fd\u7684\u89e3\u51b3\u65b9\u6848\u3002\u5728\u672c\u7814\u7a76\u4e2d\uff0c\u4f5c\u8005\u8c03\u67e5\u7814\u7a76\u4e86\u56db\u4e01\u57fa\u6c22\u6c27\u5316\u94f5\u66ff\u4ee3\u76ee\u524d\u4f7f\u7528\u7684\u56db\u7532\u57fa\u6c22\u6c27\u5316\u94f5\u663e\u5f71\u6db2\u7684\u53ef\u80fd\u6027\u3002\u4f7f\u7528\u56db\u4e01\u57fa\u6c22\u6c27\u5316\u94f5\u663e\u5f71\u5242\u53ef\u4ee5\u5b9e\u73b0\u5149\u523b\u6027\u80fd\u7684\u663e\u8457\u6539\u5584\u3002<\/p>\n<p align=\"left\"><a href=\"https:\/\/c.na8.content.force.com\/servlet\/servlet.FileDownload?file=00PC000000D98F9\">Alternative Developer Solutions for Extreme Ultraviolet Resist (Toshiro Itani and Julius Joseph Santillan, 2009)<\/a><\/p>\n<p align=\"left\">\u56db\u4e19\u57fa\u6c22\u6c27\u5316\u94f5\u548c\u56db\u4e01\u57fa\u6c22\u6c27\u5316\u94f5\u542b\u6c34\u663e\u5f71\u6db2\u88ab\u63d0\u8bae\u4f5c\u4e3a\u56db\u7532\u57fa\u6c22\u6c27\u5316\u94f5\u542b\u6c34\u663e\u5f71\u6db2\u7684\u66ff\u4ee3\u7269\u4f7f\u7528\uff08\u534a\u5bfc\u4f53\u884c\u4e1a\u6807\u51c6\uff09\u3002\u6781\u7aef\u8fdc\u7d2b\u5916\u5149\u523b\u80f6\u4f7f\u7528\u56db\u7532\u57fa\u6c22\u6c27\u5316\u94f5\u3001\u56db\u4e19\u57fa\u6c22\u6c27\u5316\u94f5\u548c\u56db\u4e01\u57fa\u6c22\u6c27\u5316\u94f5\u663e\u5f71\u6db2\u7684\u6eb6\u89e3\u5bf9\u6bd4\u66f2\u7ebf\u5df2\u663e\u793a\u51fa\u76f8\u4f3c\u7684\u6eb6\u89e3\u7279\u6027\uff0c\u8fd9\u8868\u660e\u4f7f\u7528\u8fd9\u4e9b\u663e\u5f71\u6db2\u66ff\u4ee3\u7269\u5bf9\u5149\u523b\u80f6\u5206\u8fa8\u7387\u9650\u5236\u548c\u7075\u654f\u5ea6\u7684\u5f71\u54cd\u6781\u5c0f\u3002\u6210\u50cf\u6027\u80fd\u5206\u6790\u7ed3\u679c\u663e\u793a\u4e86\u5728\u5206\u8fa8\u7387\u6027\u80fd\u548c\u654f\u611f\u5ea6\u4e0a\u7684\u5fae\u4e0d\u8db3\u9053\u7684\u5f71\u54cd\u3002\u636e\u89c2\u5bdf\uff0c\u4f7f\u7528\u56db\u4e01\u57fa\u6c22\u6c27\u5316\u94f5\u548c\u6807\u51c6\u56db\u7532\u57fa\u6c22\u6c27\u5316\u94f5\u663e\u5f71\u6db2\u6539\u5584\u4e86 20% \u7684 LWR\u3002\u76f8\u5bf9\u4e8e\u4f7f\u7528\u56db\u4e01\u57fa\u6c22\u6c27\u5316\u94f5\u663e\u5f71\u6db2\u800c\u8a00\uff0c\u8fd9\u79cd\u6539\u5584\u88ab\u8ba4\u4e3a\u662f\u6eb6\u89e3\u4e2d\u663e\u8457\u589e\u957f\u7684\u7ed3\u679c\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u5149\u963b\u5242\u5e94\u7528\u7684\u914d\u65b9\u6210\u5206 20 \u591a\u5e74\u4ee5\u6765\uff0cSACHEM \u4e00\u76f4\u662f\u7528\u4e8e\u7535\u5b50\u5e94\u7528\u7684\u663e\u5f71\u5242\u7535\u5b50\u914d\u65b9\u6210\u5206\u7684\u9886\u5148\u4f9b\u5e94\u5546\u3002\u5927\u90e8\u5206 &hellip;<\/p>\n","protected":false},"author":43,"featured_media":0,"parent":8083,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-10316","page","type-page","status-publish","hentry","no-thumb"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.sacheminc.com\/zh-hans\/wp-json\/wp\/v2\/pages\/10316","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sacheminc.com\/zh-hans\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.sacheminc.com\/zh-hans\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.sacheminc.com\/zh-hans\/wp-json\/wp\/v2\/users\/43"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sacheminc.com\/zh-hans\/wp-json\/wp\/v2\/comments?post=10316"}],"version-history":[{"count":0,"href":"https:\/\/www.sacheminc.com\/zh-hans\/wp-json\/wp\/v2\/pages\/10316\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.sacheminc.com\/zh-hans\/wp-json\/wp\/v2\/pages\/8083"}],"wp:attachment":[{"href":"https:\/\/www.sacheminc.com\/zh-hans\/wp-json\/wp\/v2\/media?parent=10316"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}