{"id":14937,"date":"2014-04-11T08:24:00","date_gmt":"2014-04-11T08:24:00","guid":{"rendered":"http:\/\/sacheminc.com\/news\/sachem-spie-%ec%b2%a8%eb%8b%a8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc-%ec%bb%a8%ed%8d%bc%eb%9f%b0%ec%8a%a4-%ec%b0%b8%ea%b0%80\/"},"modified":"2014-04-11T08:24:00","modified_gmt":"2014-04-11T08:24:00","slug":"sachem-spie-%ec%b2%a8%eb%8b%a8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc-%ec%bb%a8%ed%8d%bc%eb%9f%b0%ec%8a%a4-%ec%b0%b8%ea%b0%80","status":"publish","type":"post","link":"https:\/\/www.sacheminc.com\/ko\/sachem-spie-%ec%b2%a8%eb%8b%a8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc-%ec%bb%a8%ed%8d%bc%eb%9f%b0%ec%8a%a4-%ec%b0%b8%ea%b0%80\/","title":{"rendered":"SACHEM, SPIE \ucca8\ub2e8 \ub9ac\uc18c\uadf8\ub798\ud53c \ucee8\ud37c\ub7f0\uc2a4 \ucc38\uac00"},"content":{"rendered":"<p><strong>2<\/strong><strong>\uc6d4 23~27\uc77c<\/strong>\u00a0\u00a0SACHEM \uc9c1\uc6d0\uc774 \uce98\ub9ac\ud3ec\ub2c8\uc544\uc8fc, \uc0c8\ub108\uc81c\uc774\uc5d0\uc11c \uc5f4\ub9ac\ub294 2014 SPIE \ucca8\ub2e8 \ub9ac\uc18c\uadf8\ub798\ud53c \ucee8\ud37c\ub7f0\uc2a4\uc5d0 \ucc38\uac00\ud569\ub2c8\ub2e4. \u00a038\ub144 \ub3d9\uc548 SPIE\ub294 \ucc28\uc138\ub300 \uc9d1\uc801 \ud68c\ub85c\ub97c \uac00\uacf5\ud558\ub294 \uacfc\uc815\uc5d0\uc11c \ub098\ud0c0\ub098\ub294 \uacfc\uc81c\ub97c \ud574\uacb0\ud558\uae30 \uc704\ud574 \uc9c0\uc5ed \uc0ac\ud68c\uc640 \ud798\uc744 \ud569\uccd0 \ub178\ub825\ud588\uc2b5\ub2c8\ub2e4.<\/p>\n<p>SACHEM\uc740 20\uc5ec \ub144 \ub3d9\uc548 \uc804\uc790 \ubd84\uc57c\uc5d0\uc11c \ud604\uc0c1\uc561 \uc81c\uc870\uc5d0 \uc0ac\uc6a9\ud558\ub294 \uc804\uc790 \ubc30\ud569 \uc131\ubd84\uc744 \uacf5\uae09\ud574 \uc628 \uc120\ub450 \uc5c5\uccb4\uc785\ub2c8\ub2e4. \ub300\ubd80\ubd84\uc758 \ud604\uc0c1\uc561\uc740\u00a0<a title=\"Tetramethylammonium Hydroxide (TMAH)\" href=\"\/?page_id=10499\">TMAH(\ud14c\ud2b8\ub77c\uba54\ud2f8\uc554\ubaa8\ub284\ud558\uc774\ub4dc\ub85d\uc0ac\uc774\ub4dc)<\/a>\u00a0\ubc0f\u00a0<a title=\"Tetrabutylammonium Hydroxide (TBAH)\" href=\"\/?page_id=10467\">TBAH(\ud14c\ud2b8\ub77c\ubd80\ud2f8\uc554\ubaa8\ub284\ud558\uc774\ub4dc\ub85d\uc0ac\uc774\ub4dc)<\/a>\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc6a9\ud574\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. SACHEM\uc740 \uc804\uc790 \uc5c5\uacc4\uc5d0\uc11c \uc99d\uac00\ud558\ub294 \uc131\ub2a5, \uc548\uc804 \ubc0f \ud488\uc9c8 \ud45c\uc900\uc744 \ucda9\uc871\ud560 \uc218 \uc788\ub294\u00a0Envure DV\u2122<a title=\"Photoresist Developer | Envure DV\" href=\"\/?page_id=10319\">https:\/\/sacheminc.com\/solutions\/ic-development\/<\/a>\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4. \u00a0Envure DV\u2122\ub294 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \ud604\uc0c1\uc561\uacfc \ub9ac\uc18c\uadf8\ub798\ud53c \uc751\uc6a9 \ubd84\uc57c\uc6a9\uc73c\ub85c \ud2b9\ubcc4 \uc124\uacc4\ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>2\uc6d4 23~27\uc77c\u00a0\u00a0SACHEM \uc9c1\uc6d0\uc774 \uce98\ub9ac\ud3ec\ub2c8\uc544\uc8fc, \uc0c8\ub108\uc81c\uc774\uc5d0\uc11c \uc5f4\ub9ac\ub294 2014 SPIE \ucca8\ub2e8 \ub9ac\uc18c\uadf8\ub798\ud53c \ucee8\ud37c\ub7f0\uc2a4\uc5d0 \ucc38\uac00\ud569\ub2c8\ub2e4. \u00a038\ub144 \ub3d9\uc548 SPIE\ub294 \ucc28\uc138\ub300 \uc9d1\uc801 \ud68c\ub85c\ub97c \uac00\uacf5\ud558\ub294 \uacfc\uc815\uc5d0\uc11c \ub098\ud0c0\ub098\ub294 \uacfc\uc81c\ub97c \ud574\uacb0\ud558\uae30 \uc704\ud574 \uc9c0\uc5ed \uc0ac\ud68c\uc640 \ud798\uc744 \ud569\uccd0 \ub178\ub825\ud588\uc2b5\ub2c8\ub2e4. SACHEM\uc740 20\uc5ec \ub144 \ub3d9\uc548 \uc804\uc790 \ubd84\uc57c\uc5d0\uc11c \ud604\uc0c1\uc561 \uc81c\uc870\uc5d0 \uc0ac\uc6a9\ud558\ub294 \uc804\uc790 \ubc30\ud569 \uc131\ubd84\uc744 \uacf5\uae09\ud574 \uc628 \uc120\ub450 \uc5c5\uccb4\uc785\ub2c8\ub2e4. \ub300\ubd80\ubd84\uc758 \ud604\uc0c1\uc561\uc740\u00a0TMAH(\ud14c\ud2b8\ub77c\uba54\ud2f8\uc554\ubaa8\ub284\ud558\uc774\ub4dc\ub85d\uc0ac\uc774\ub4dc)\u00a0\ubc0f\u00a0TBAH(\ud14c\ud2b8\ub77c\ubd80\ud2f8\uc554\ubaa8\ub284\ud558\uc774\ub4dc\ub85d\uc0ac\uc774\ub4dc)\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc6a9\ud574\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. SACHEM\uc740 \uc804\uc790 \uc5c5\uacc4\uc5d0\uc11c \uc99d\uac00\ud558\ub294 \uc131\ub2a5, &hellip;<\/p>\n","protected":false},"author":43,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"wds_primary_category":0,"footnotes":""},"categories":[321,322,165,162],"tags":[],"class_list":["post-14937","post","type-post","status-publish","format-standard","hentry","category-ic-integrated-circuit-ko","category-lithography-ko","category-165","category-162","no-thumb"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/posts\/14937","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/users\/43"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/comments?post=14937"}],"version-history":[{"count":0,"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/posts\/14937\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/media?parent=14937"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/categories?post=14937"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/tags?post=14937"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}