{"id":14905,"date":"2014-04-02T21:33:40","date_gmt":"2014-04-02T21:33:40","guid":{"rendered":"http:\/\/sacheminc.com\/news\/sachem-unveils-new-solutions-platinum-sponsor-sematech-surface-preparation-cleaning-conference-spcc-austin-texas-april-22-24-2014-2\/"},"modified":"2014-04-11T08:25:31","modified_gmt":"2014-04-11T08:25:31","slug":"sachem-2014%eb%85%84-4%ec%9b%94-2224%ec%9d%bc-%ed%85%8d%ec%82%ac%ec%8a%a4%ec%a3%bc-%ec%98%a4%ec%8a%a4%ed%8b%b4%ec%97%90%ec%84%9c-%ec%97%b4%eb%a6%ac%eb%8a%94-sematech-spccsurface-preparation-and-cl","status":"publish","type":"post","link":"https:\/\/www.sacheminc.com\/ko\/sachem-2014%eb%85%84-4%ec%9b%94-2224%ec%9d%bc-%ed%85%8d%ec%82%ac%ec%8a%a4%ec%a3%bc-%ec%98%a4%ec%8a%a4%ed%8b%b4%ec%97%90%ec%84%9c-%ec%97%b4%eb%a6%ac%eb%8a%94-sematech-spccsurface-preparation-and-cl\/","title":{"rendered":"SACHEM, 2014\ub144 4\uc6d4 22~24\uc77c \ud14d\uc0ac\uc2a4\uc8fc, \uc624\uc2a4\ud2f4\uc5d0\uc11c \uc5f4\ub9ac\ub294 SEMATECH SPCC(Surface Preparation and Cleaning Conference)\uc5d0\uc11c \ud50c\ub798\ud2f0\ub118 \ud6c4\uc6d0 \uc5c5\uccb4\ub85c\uc11c \uc0c8 \uc6a9\uc561 \ucd9c\uc2dc"},"content":{"rendered":"

2014\ub144 3\uc6d4 31\uc77c \u00a0 \u00a0\u00a0SACHEM, Inc.\uc740 \ud14d\uc0ac\uc2a4\uc8fc, \uc624\uc2a4\ud2f4\uc5d0\uc11c \uc5f4\ub9ac\ub294 SEMATECH SPCC\uc758 \ud50c\ub798\ud2f0\ub118 \ud6c4\uc6d0 \uc5c5\uccb4\ub85c \uc120\uc815\ub418\uc5c8\uc74c\uc744 \uc624\ub298 \ubc1c\ud45c\ud588\uc2b5\ub2c8\ub2e4. \uc804\ubb38\uac00\ub4e4\uc774 SACHEM\uc758 Envure System\u2122, \u00a0In-Ga-Zn-O (IGZO) TFT<\/a>\uc758 \uc0c8 \uc6a9\uc561, \ubd80\ub4dc\ub7ec\uc6b4 \uc2e4\ub9ac\ucf58 \uc5d0\uce6d\uc5d0 \ub300\ud55c \uac1c\uc694\ub97c \uc124\uba85\ud574\ub4dc\ub9bd\ub2c8\ub2e4.<\/p>\n

SACHEM\uc740 IGZO \uae30\ubc18 TFT \uc81c\uc870\ub97c \uc704\ud55c \uc0c8\ub85c\uc6b4 \uc2b5\uc2dd \ud654\ud559\uc2dd \uc704\ud5d8 \ubc29\uc9c0 \ubd80\uc2dd\uc561\uc744 \uac1c\ubc1c\ud558\uc600\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ub3c5\uc810 \ud3ec\ubbac\ub7ec\ub4e4\uc740 \uc54c\ub8e8\ubbf8\ub284, \ubab0\ub9ac\ube0c\ub374, \uad6c\ub9ac, \ud2f0\ud0c0\ub284\uacfc \uac19\uc740 \uc18c\uc2a4\/\ub4dc\ub808\uc778 \uae08\uc18d\uc758 \uc120\ud0dd\uc801 \uc5d0\uce6d\uc744 \uc0c1\ub2f9\uc218 \uc99d\uac00\uc2dc\ud0b5\ub2c8\ub2e4. \uc5d0\uce6d \uc815\uc9c0\uce35\uc744 \uc0ac\uc6a9\ud568\uc73c\ub85c\uc368 IGZO \ucc44\ub110\uc744 \uc9c0\uc18d\uc801\uc73c\ub85c \uc774\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \uc0c8\ub85c\uc6b4 \uc6a9\uc561\uc740 Devera\u2122 \uc2dc\ub9ac\uc988\uc758 \ucd5c\uc2e0 \uc81c\ud488\uc774 \ub420 \uac83\uc785\ub2c8\ub2e4.<\/p>\n

SACHEM\uc758 TSV Reveal Etch \uc6a9\uc561\uc740 \ube60\ub978 \uc2e4\ub9ac\ucf58 \uc5d0\uce6d \ubc0f \ubd80\ub4dc\ub7ec\uc6b4 \ud45c\uba74 \ub9c8\uac10\uc744 \uc704\ud574 \ud2b9\ubcc4 \ub514\uc790\uc778\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc774 \uc81c\ud488\uc740 TMAH \ubc0f KOH\ubcf4\ub2e4 2~4\ubc30 \ub354 \ube60\ub978 \uc5d0\uce6d \uc18d\ub3c4\ub97c \uc790\ub791\ud569\ub2c8\ub2e4. \uc774 \uc0c8\ub85c\uc6b4 \uc6a9\uc561\uc740 3D \ud3ec\uc7a5 \uc751\uc6a9 \ubd84\uc57c\uc6a9 \uc774\ud37c \uc138\ucc99, \ubc15\ub9ac, \uc120\ud0dd\uc801 \uc5d0\uce6d \ubc0f \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \ud604\uc0c1\uc561 \ud654\ud559\ubb3c\uc9c8 \uc6a9\uc561\uc744 \uc81c\uc791\ud558\ub294 \uc870\uc81c\uc5c5\uccb4\uc5d0\uc11c \uc0ac\uc6a9\ub418\ub294 \ud3ec\ud2b8\ud3f4\ub9ac\uc624\uc758 \uc77c\ubd80\uc785\ub2c8\ub2e4.<\/p>\n

\uae00\ub85c\ubc8c \uc804\uc790 \ub9c8\ucf00\ud305 \uad00\ub9ac\uc790\uc778 Kevin McLaughlin\uc740 \u201cSACHEM \ubc30\ud569 \uc6a9\uc561 \uacf5\uae09\uc5c5\uccb4\ub4e4\uc774 \uc9c1\uba74\ud55c \ub3c4\uc804\uacfc\uc81c\ub97c \uc774\ud574\ud558\uace0 \uc788\uc73c\uba70, \uc774\ub7ec\ud55c \ub3c4\uc804\uacfc\uc81c\ub97c \ub9cc\uc871\uc2dc\ud0a4\ub294 \uace0\uc21c\ub3c4 \uc131\ubd84\uc744 \uc81c\uc870\ud569\ub2c8\ub2e4. \ub610\ud55c \uc800\ud76c\ub294 \uc81c\ud488 \uac1c\ubc1c\uc5d0 \uc788\uc5b4 \ud30c\ud2b8\ub108\uc2ed \ubc0f \ud611\uc5c5\uc758 \ud544\uc694\uc131\uc744 \uc798 \uc54c\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ub2f9\uc0ac\uc758 \uc131\uacf5\uc740 \ud30c\ud2b8\ub108\uc2ed\uc744 \ud1a0\ub300\ub85c \uc774\ub8e9\ud55c \uac83\uc785\ub2c8\ub2e4.”\ub77c\uace0 \ub9d0\ud588\uc2b5\ub2c8\ub2e4.<\/p>\n

SACHEM\uc758\u00a0Envure System<\/a>\u2122\uc740 \uc815\ubc00\ud558\uace0 \ubcf5\uc7a1\ud55c \uc6e8\uc774\ud37c \uc138\ucc99, \uc120\ud0dd\uc801 \uc5d0\uce6d, \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \ud604\uc0c1 \ubc0f \ud45c\uba74 \ubc15\ub9ac \uc900\ube44 \uc694\uad6c\ub97c \ucda9\uc871\ud558\ub294 \uc218\uc131 \ubc0f \ube44\uc218\uc131 \uc804\uc790 \ud3ec\ubbac\ub7ec \uc131\ubd84\uacfc TMAH \ub300\uc548\uc81c\ud488 \ud50c\ub7ab\ud3fc\uc785\ub2c8\ub2e4. \uc774\ub294 SACHEM\uc758 \ubc18\ub3c4\uccb4 \ud654\ud559\uacfc \uacf5\uc815\uc5d0 \uad00\ud55c \uc804\ubb38\uc9c0\uc2dd\uacfc \ud568\uaed8 \uc5c4\uaca9\ud55c \uc2dc\uc7a5\uc758 \uc694\uad6c\uc0ac\ud56d\uacfc \uc5c5\uacc4\uc758 \ud601\uc2e0\uc744 \ucda9\uc871\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

SEMATECH SPCC(Surface Preparation and Cleaning Conferenc)<\/a>\uc5d0\uc11c \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc758 \uc720\ub9dd\ud55c \uc5f0\uad6c\uc790\uc640 \ub300\ud559 \ucee4\ubba4\ub2c8\ud2f0\uac00 \uacf5\ub3d9\uc73c\ub85c \ucca8\ub2e8 \uc6e8\uc774\ud37c\uc640 \ub9c8\uc2a4\ud06c \uc138\ucc99 \ubc0f \ud45c\uba74 \ucc98\ub9ac \uae30\uc220\uc758 \ud604\uc7ac \uac1c\ubc1c \ubc0f ITRS \ub09c\uc81c\uc5d0 \ucd08\uc810\uc744 \ub9de\ucda5\ub2c8\ub2e4.<\/p>\n","protected":false},"excerpt":{"rendered":"

2014\ub144 3\uc6d4 31\uc77c \u00a0 \u00a0\u00a0SACHEM, Inc.\uc740 \ud14d\uc0ac\uc2a4\uc8fc, \uc624\uc2a4\ud2f4\uc5d0\uc11c \uc5f4\ub9ac\ub294 SEMATECH SPCC\uc758 \ud50c\ub798\ud2f0\ub118 \ud6c4\uc6d0 \uc5c5\uccb4\ub85c \uc120\uc815\ub418\uc5c8\uc74c\uc744 \uc624\ub298 \ubc1c\ud45c\ud588\uc2b5\ub2c8\ub2e4. \uc804\ubb38\uac00\ub4e4\uc774 SACHEM\uc758 Envure System\u2122, \u00a0In-Ga-Zn-O (IGZO) TFT\uc758 \uc0c8 \uc6a9\uc561, \ubd80\ub4dc\ub7ec\uc6b4 \uc2e4\ub9ac\ucf58 \uc5d0\uce6d\uc5d0 \ub300\ud55c \uac1c\uc694\ub97c \uc124\uba85\ud574\ub4dc\ub9bd\ub2c8\ub2e4. SACHEM\uc740 IGZO \uae30\ubc18 TFT \uc81c\uc870\ub97c \uc704\ud55c \uc0c8\ub85c\uc6b4 \uc2b5\uc2dd \ud654\ud559\uc2dd \uc704\ud5d8 \ubc29\uc9c0 \ubd80\uc2dd\uc561\uc744 \uac1c\ubc1c\ud558\uc600\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ub3c5\uc810 \ud3ec\ubbac\ub7ec\ub4e4\uc740 \uc54c\ub8e8\ubbf8\ub284, \ubab0\ub9ac\ube0c\ub374, \uad6c\ub9ac, \ud2f0\ud0c0\ub284\uacfc \uac19\uc740 \uc18c\uc2a4\/\ub4dc\ub808\uc778 \uae08\uc18d\uc758 …<\/p>\n","protected":false},"author":43,"featured_media":14899,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"wds_primary_category":0,"footnotes":""},"categories":[311,321,312,322,162],"tags":[],"class_list":["post-14905","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-flat-panel-display-ko","category-ic-integrated-circuit-ko","category-igzo-ko","category-lithography-ko","category-162","has-thumb"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/posts\/14905","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/users\/43"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/comments?post=14905"}],"version-history":[{"count":0,"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/posts\/14905\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/media?parent=14905"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/categories?post=14905"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sacheminc.com\/ko\/wp-json\/wp\/v2\/tags?post=14905"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}