{"id":14942,"date":"2014-04-11T12:37:32","date_gmt":"2014-04-11T12:37:32","guid":{"rendered":"http:\/\/sacheminc.com\/news\/sachem-%e3%81%8c-spie-%e5%85%88%e9%80%b2%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e3%83%bc%e3%82%ab%e3%83%b3%e3%83%95%e3%82%a1%e3%83%ac%e3%83%b3%e3%82%b9%e3%81%ab%e5%8f%82%e5%8a%a0\/"},"modified":"2014-04-11T12:37:32","modified_gmt":"2014-04-11T12:37:32","slug":"sachem-%e3%81%8c-spie-%e5%85%88%e9%80%b2%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e3%83%bc%e3%82%ab%e3%83%b3%e3%83%95%e3%82%a1%e3%83%ac%e3%83%b3%e3%82%b9%e3%81%ab%e5%8f%82%e5%8a%a0","status":"publish","type":"post","link":"https:\/\/www.sacheminc.com\/ja\/sachem-%e3%81%8c-spie-%e5%85%88%e9%80%b2%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e3%83%bc%e3%82%ab%e3%83%b3%e3%83%95%e3%82%a1%e3%83%ac%e3%83%b3%e3%82%b9%e3%81%ab%e5%8f%82%e5%8a%a0\/","title":{"rendered":"SACHEM \u304c SPIE \u5148\u9032\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u30ab\u30f3\u30d5\u30a1\u30ec\u30f3\u30b9\u306b\u53c2\u52a0"},"content":{"rendered":"<p><strong>2<\/strong><strong>\u6708<\/strong><strong>23-27<\/strong><strong>\u65e5<\/strong>\u00a0\u00a0SACHEM \u306e\u30e1\u30f3\u30d0\u30fc\u306f\u3001\u30ab\u30ea\u30d5\u30a9\u30eb\u30cb\u30a2\u5dde\u30b5\u30f3\u30b8\u30e7\u30bc\u306e 2014 SPIE \u5148\u9032\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u30ab\u30f3\u30d5\u30a1\u30ec\u30f3\u30b9\u306b\u53c2\u52a0\u3057\u307e\u3059\u3002 \u00a038\u5e74\u9593\u3001SPIE \u306f\u6b21\u4e16\u4ee3\u96c6\u7a4d\u56de\u8def\u88fd\u9020\u3067\u767a\u751f\u3059\u308b\u8ab2\u984c\u306b\u53d6\u308a\u7d44\u3080\u3053\u306e\u30b3\u30df\u30e5\u30cb\u30c6\u30a3\u306e\u793e\u4ea4\u306e\u5834\u3068\u306a\u3063\u3066\u304d\u307e\u3057\u305f\u3002<\/p>\n<p>SACHEM\u306f\u96fb\u5b50\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u5411\u3051\u306e\u73fe\u50cf\u5264\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u4f7f\u308f\u308c\u308b\u96fb\u5b50\u914d\u5408\u6210\u5206\u306e\u30ea\u30fc\u30c7\u30a3\u30f3\u30b0\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u3067\u3042\u308a\u300120\u5e74\u4ee5\u4e0a\u306b\u308f\u305f\u308a\u305d\u306e\u30dd\u30b8\u30b7\u30e7\u30f3\u3092\u7dad\u6301\u3057\u7d9a\u3051\u3066\u3044\u307e\u3059\u3002 \u307b\u3068\u3093\u3069\u306e\u73fe\u50cf\u5264\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306f\u3001<a title=\"Tetramethylammonium Hydroxide (TMAH)\" href=\"\/?page_id=10498\">\u6c34\u9178\u5316\u30c6\u30c8\u30e9\u30e1\u30c1\u30eb\u30a2\u30f3\u30e2\u30cb\u30a6\u30e0 (TMAH)<\/a>\u304a\u3088\u3073<a title=\"Tetrabutylammonium Hydroxide (TBAH)\" href=\"\/?page_id=10466\">\u6c34\u9178\u5316\u30c6\u30c8\u30e9\u30d6\u30c1\u30eb\u30a2\u30f3\u30e2\u30cb\u30a6\u30e0 (TBAH)<\/a>\u3092\u4f7f\u3063\u3066\u6eb6\u89e3\u3055\u308c\u3066\u304d\u307e\u3057\u305f\u3002 SACHEM\u306f\u3001\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u696d\u754c\u3067\u9ad8\u307e\u3063\u3066\u3044\u308b\u6027\u80fd\u3001\u5b89\u5168\u6027\u3001\u304a\u3088\u3073\u54c1\u8cea\u306e\u5404\u57fa\u6e96\u3092\u6e80\u305f\u3059\u305f\u3081\u306b<a title=\"Photoresist Developer | Envure DV\u30fb\" href=\"\/?page_id=10318\">Envure DV\u2122<\/a>\u3092\u958b\u767a\u3057\u307e\u3057\u305f\u3002 \u00a0Envure DV\u2122\u00a0\u306f\u3001\u30d5\u30a9\u30c8\u30ec\u30b8\u30b9\u30c8\u73fe\u50cf\u5264\u304a\u3088\u3073\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u7528\u306b\u7279\u306b\u8a2d\u8a08\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>2\u670823-27\u65e5\u00a0\u00a0SACHEM \u306e\u30e1\u30f3\u30d0\u30fc\u306f\u3001\u30ab\u30ea\u30d5\u30a9\u30eb\u30cb\u30a2\u5dde\u30b5\u30f3\u30b8\u30e7\u30bc\u306e 2014 SPIE \u5148\u9032\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u30ab\u30f3\u30d5\u30a1\u30ec\u30f3\u30b9\u306b\u53c2\u52a0\u3057\u307e\u3059\u3002 \u00a038\u5e74\u9593\u3001SPIE \u306f\u6b21\u4e16\u4ee3\u96c6\u7a4d\u56de\u8def\u88fd\u9020\u3067\u767a\u751f\u3059\u308b\u8ab2\u984c\u306b\u53d6\u308a\u7d44\u3080\u3053\u306e\u30b3\u30df &hellip;<\/p>\n","protected":false},"author":43,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"wds_primary_category":0,"footnotes":""},"categories":[319,320,177,180],"tags":[],"class_list":["post-14942","post","type-post","status-publish","format-standard","hentry","category-ic-integrated-circuit-ja","category-lithography-ja","category-177","category-180","no-thumb"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/posts\/14942","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/users\/43"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/comments?post=14942"}],"version-history":[{"count":0,"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/posts\/14942\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/media?parent=14942"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/categories?post=14942"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/tags?post=14942"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}