{"id":14904,"date":"2014-04-02T21:33:40","date_gmt":"2014-04-02T21:33:40","guid":{"rendered":"http:\/\/sacheminc.com\/news\/sachem-unveils-new-solutions-platinum-sponsor-sematech-surface-preparation-cleaning-conference-spcc-austin-texas-april-22-24-2014-2\/"},"modified":"2014-04-11T12:38:25","modified_gmt":"2014-04-11T12:38:25","slug":"sachem-%e3%81%8c%e3%83%86%e3%82%ad%e3%82%b5%e3%82%b9%e5%b7%9e%e3%82%aa%e3%83%bc%e3%82%b9%e3%83%81%e3%83%b3%e3%81%a72014%e5%b9%b44%e6%9c%8822%e6%97%a5%ef%bd%9e24%e6%97%a5%e3%81%ab%e9%96%8b%e5%82%ac","status":"publish","type":"post","link":"https:\/\/www.sacheminc.com\/ja\/sachem-%e3%81%8c%e3%83%86%e3%82%ad%e3%82%b5%e3%82%b9%e5%b7%9e%e3%82%aa%e3%83%bc%e3%82%b9%e3%83%81%e3%83%b3%e3%81%a72014%e5%b9%b44%e6%9c%8822%e6%97%a5%ef%bd%9e24%e6%97%a5%e3%81%ab%e9%96%8b%e5%82%ac\/","title":{"rendered":"SACHEM \u304c\u30c6\u30ad\u30b5\u30b9\u5dde\u30aa\u30fc\u30b9\u30c1\u30f3\u30672014\u5e744\u670822\u65e5\uff5e24\u65e5\u306b\u958b\u50ac\u3055\u308c\u308b SEMATECH \u8868\u9762\u51e6\u7406\u30fb\u6d17\u6d44\u4f1a\u8b70\u306b\u304a\u3044\u3066\u30d7\u30e9\u30c1\u30ca\u30b9\u30dd\u30f3\u30b5\u30fc\u3068\u3057\u3066\u65b0\u3057\u3044\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3092\u767a\u8868"},"content":{"rendered":"

2014\u5e743\u670831\u65e5 \u00a0 \u00a0\u00a0SACHEM, Inc. \u306f\u672c\u65e5\u3001\u30c6\u30ad\u30b5\u30b9\u5dde\u30aa\u30fc\u30b9\u30c1\u30f3\u306e SEMATECH SPCC \u3067\u30d7\u30e9\u30c1\u30ca\u30b9\u30dd\u30f3\u30b5\u30fc\u306b\u306a\u308b\u3053\u3068\u3092\u767a\u8868\u3057\u307e\u3057\u305f\u3002 SACHEM \u306e\u30a8\u30ad\u30b9\u30d1\u30fc\u30c8\u306f\u3001In-Ga-Zn-O (IGZO) TFT<\/a>\u00a0\u3067\u306e\u65b0\u3057\u3044\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3067\u3042\u308a\u30b9\u30e0\u30fc\u30ba\u306a\u30b7\u30ea\u30b3\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0\u3067\u3042\u308b Envure System\u2122 \u306e\u6982\u8981\u3092\u767a\u8868\u3059\u308b\u3053\u3068\u306b\u306a\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n

SACHEM \u306f\u3001IGZO \u30d9\u30fc\u30b9\u306e TFT \u88fd\u9020\u306b\u7528\u3044\u308b\u6e7f\u5f0f\u5316\u5b66\u30c0\u30e1\u30fc\u30b8\u30d5\u30ea\u30fc\u306e\u65b0\u3057\u3044\u30a8\u30c3\u30c1\u30f3\u30b0\u5264\u3092\u8a2d\u8a08\u3057\u307e\u3057\u305f\u3002\u3053\u306e\u81ea\u793e\u958b\u767a\u306e\u914d\u5408\u306f\u3001\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u3001\u30e2\u30ea\u30d6\u30c7\u30f3\u3001\u9285\u3001\u30c1\u30bf\u30f3\u3068\u3044\u3063\u305f\u30bd\u30fc\u30b9\/\u30c9\u30ec\u30a4\u30f3\u306e\u91d1\u5c5e\u306e\u9078\u629e\u7684\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u5927\u304d\u304f\u6539\u5584\u3057\u307e\u3059\u3002 IGZO \u306e\u30c1\u30e3\u30cd\u30eb\u3092\u4fdd\u8b77\u3059\u308b\u30a8\u30c3\u30c1\u30f3\u30b0\u505c\u6b62\u5c64\u3092\u4f7f\u3046\u5fc5\u8981\u306f\u3082\u3046\u3042\u308a\u307e\u305b\u3093\u3002\u3053\u306e\u65b0\u3057\u3044\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306f\u3001 Devera\u2122\u00a0 \u88fd\u54c1\u30d5\u30a1\u30df\u30ea\u30fc\u306e\u6700\u65b0\u30e1\u30f3\u30d0\u30fc\u3068\u306a\u308a\u307e\u3059\u3002<\/p>\n

SACHEM \u306e TSV \u9732\u51fa\u30a8\u30c3\u30c1\u30f3\u30b0\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306f\u3001\u7279\u306b\u9ad8\u901f\u30b7\u30ea\u30b3\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0\u3084\u30b9\u30e0\u30fc\u30ba\u306a\u8868\u9762\u4ed5\u4e0a\u306e\u305f\u3081\u306b\u8a2d\u8a08\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u3053\u306e\u88fd\u54c1\u306f\u3001TMAH \u3084 KOH \u3088\u308a 2-4 \u500d\u901f\u3044\u30a8\u30c3\u30c1\u30f3\u30b0\u901f\u5ea6\u3092\u6709\u3057\u3066\u3044\u307e\u3059\u3002 \u3053\u306e\u65b0\u3057\u3044\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306f\u30013D \u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u7528\u9014\u306b\u95a2\u3059\u308b\u30a6\u30a7\u30fc\u30cf\u6d17\u6d44\u3001\u9664\u53bb\u3001\u9078\u629e\u7684\u30a8\u30c3\u30c1\u30f3\u30b0\u3001\u30d5\u30a9\u30c8\u30ec\u30b8\u30b9\u30c8\u73fe\u50cf\u5264\u306e\u5316\u5b66\u7269\u8cea\u6eb6\u6db2\u3092\u4f5c\u6210\u3059\u308b\u914d\u5408\u8005\u306b\u3088\u3063\u3066\u7528\u3044\u3089\u308c\u308b\u5316\u5b66\u6210\u5206\u30dd\u30fc\u30c8\u30d5\u30a9\u30ea\u30aa\u306e\u4e00\u90e8\u3067\u3059\u3002<\/p>\n

\u300cSACHEM\u306f\u3001\u914d\u5408\u6eb6\u6db2\u306e\u30d7\u30ed\u30d0\u30a4\u30c0\u30fc\u304c\u76f4\u9762\u3059\u308b\u8ab2\u984c\u3084\u30c1\u30e3\u30f3\u30b9\u3092\u7406\u89e3\u3057\u3066\u3044\u307e\u3059\u300d\u3068\u3001\u30b0\u30ed\u30fc\u30d0\u30eb\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9 \u30de\u30fc\u30b1\u30c6\u30a3\u30f3\u30b0\u62c5\u5f53\u30de\u30cd\u30fc\u30b8\u30e3\u30fc\u306e\u30b1\u30d3\u30f3\u30fb\u30de\u30af\u30e9\u30fc\u30ea\u30f3\u306f\u8a9e\u308a\u307e\u3059\u3002\u300c\u3067\u3059\u306e\u3067\u3001\u79c1\u305f\u3061\u306f\u3053\u306e\u3088\u3046\u306a\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3092\u53ef\u80fd\u306b\u3059\u308b\u9ad8\u7d14\u5ea6\u306e\u6210\u5206\u3092\u88fd\u9020\u3057\u3066\u3044\u308b\u306e\u3067\u3059\u3002\u307e\u305f\u3001\u79c1\u305f\u3061\u306f\u88fd\u54c1\u958b\u767a\u3067\u306e\u30d1\u30fc\u30c8\u30ca\u30fc\u30b7\u30c3\u30d7\u3084\u30b3\u30e9\u30dc\u30ec\u30fc\u30b7\u30e7\u30f3\u306e\u5fc5\u8981\u6027\u3092\u7406\u89e3\u3057\u3066\u3044\u307e\u3059\u3002 \u5f53\u793e\u306e\u6210\u529f\u306f\u3001\u3053\u306e\u3088\u3046\u306a\u30d1\u30fc\u30c8\u30ca\u30fc\u30b7\u30c3\u30d7\u306b\u57fa\u3065\u304f\u3082\u306e\u306a\u306e\u3067\u3059\u3002\u300d<\/p>\n

SACHEM \u306eEnvure System<\/a>\u2122 \u306f\u3001\u9ad8\u7cbe\u5ea6\u3067\u8907\u96d1\u306a\u30a6\u30a7\u30fc\u30cf\u6d17\u6d44\u3001\u9078\u629e\u7684\u30a8\u30c3\u30c1\u30f3\u30b0\u3001\u30d5\u30a9\u30c8\u30ec\u30b8\u30b9\u30c8\u73fe\u50cf\u5264\u3001\u8868\u9762\u9664\u53bb\u51e6\u7406\u30cb\u30fc\u30ba\u306e\u305f\u3081\u306e\u6c34\u6027\u304a\u3088\u3073\u975e\u6c34\u6027\u914d\u5408\u6210\u5206\u306e\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u3067\u3042\u308a\u3001TMAH \u306e\u4ee3\u66ff\u88fd\u54c1\u3067\u3059\u3002 \u534a\u5c0e\u4f53\u5316\u5b66\u7269\u8cea\u304a\u3088\u3073\u51e6\u7406\u3067\u306e SACHEM \u306e\u5c02\u9580\u6280\u8853\u3092\u7d44\u307f\u5408\u308f\u305b\u305f\u3053\u306e\u88fd\u54c1\u306b\u3088\u3063\u3066\u3001\u696d\u754c\u306e\u30a4\u30ce\u30d9\u30fc\u30bf\u30fc\u306f\u53b3\u3057\u3044\u5e02\u5834\u306e\u8981\u8acb\u3092\u6e80\u305f\u3057\u3066\u3001\u305d\u3057\u3066\u4e57\u308a\u8d8a\u3048\u308b\u3053\u3068\u304c\u53ef\u80fd\u3068\u306a\u308a\u307e\u3059\u3002<\/p>\n

SEMATECH \u8868\u9762\u51e6\u7406\u30fb\u6d17\u6d44\u4f1a\u8b70 (SPCC)\u00a0 <\/a>\u306f\u3001\u534a\u5c0e\u4f53\u696d\u754c\u3068\u5927\u5b66\u306e\u30b3\u30df\u30e5\u30cb\u30c6\u30a3\u304b\u3089\u8457\u540d\u306a\u7814\u7a76\u8005\u9054\u304c\u96c6\u307e\u3063\u3066\u3001\u9ad8\u5ea6\u306a\u30a6\u30a7\u30fc\u30cf\u3068\u30de\u30b9\u30af\u6d17\u6d44\u304a\u3088\u3073\u8868\u9762\u51e6\u7406\u306e\u5404\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u306b\u304a\u3051\u308b\u73fe\u5728\u306e\u958b\u767a\u72b6\u6cc1\u3068ITRS\u306e\u8ab2\u984c\u306b\u95a2\u3057\u3066\u691c\u8a0e\u3092\u884c\u3046\u5e74\u6b21\u884c\u4e8b\u3067\u3059\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

2014\u5e743\u670831\u65e5 \u00a0 \u00a0\u00a0SACHEM, Inc. \u306f\u672c\u65e5\u3001\u30c6\u30ad\u30b5\u30b9\u5dde\u30aa\u30fc\u30b9\u30c1\u30f3\u306e SEMATECH SPCC \u3067\u30d7\u30e9\u30c1\u30ca\u30b9\u30dd\u30f3\u30b5\u30fc\u306b\u306a\u308b\u3053\u3068\u3092\u767a\u8868\u3057\u307e\u3057\u305f\u3002 SACHEM \u306e\u30a8\u30ad\u30b9\u30d1\u30fc\u30c8\u306f\u3001In-Ga-Zn-O ( …<\/p>\n","protected":false},"author":43,"featured_media":14899,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"wds_primary_category":0,"footnotes":""},"categories":[309,319,310,320,177],"tags":[],"class_list":["post-14904","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-flat-panel-display-ja","category-ic-integrated-circuit-ja","category-igzo-ja","category-lithography-ja","category-177","has-thumb"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/posts\/14904","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/users\/43"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/comments?post=14904"}],"version-history":[{"count":0,"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/posts\/14904\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/media?parent=14904"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/categories?post=14904"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sacheminc.com\/ja\/wp-json\/wp\/v2\/tags?post=14904"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}