TETRAPROPYLAMMONIUM HYDROXIDE (TPAH)
Tetrapropylammonium hydroxide (TPAH) provides the precision and accuracy needed for post-CMP cleaning.

As device dimensions scale down, post CMP Cleaning requires more precise and accurate products. Tetrapropylammonium hydroxide (TPAH) enhances the performance of these cleaning solutions.

Take a look at the publication below for details on how tetrapropylammonium hydroxides and other tetraalkylammonium hydroxides can improce post CMP Cleaning.


Publication
"Performance Evaluation of Cleaning Solutions Enhanced with Tetraalkylammonium Hydroxide Substituents for Post-CMP Cleaning on Poly-Si Film"

J. Electrochem. Soc., Volume 149, Issue 6, pp. G336-G342 (June 2002)

Tung Ming Pan, Tan Fu Lei, Fu Hsiang Ko, Tian Sheng Chao, Ming Chi Liaw, Ying Hao Lee, and Ching Peng Lu

Available Products

Tetrapropylammonium Hydroxide

40%, Aqueous, Technical Grade (TPAH 40% Aq Tech) CAS# 4499-86-9
M/SDS  |  SDS [14 KB]  |  Datasheet [37 KB]  

Tetrapropylammonium Hydroxide

40%, Aqueous, Low Sodium (TPAH 40% Aq Low Na) CAS# 4499-86-9
M/SDS  |  Datasheet [37 KB]  

Tetrapropylammonium Hydroxide

40%, Aqueous, Envure™ (Envure™-846) CAS# 4499-86-9
M/SDS  |  Datasheet [35 KB]  

Tetrapropylammonium Hydroxide

10%, Propylene Glycol Solution (Envure™ 847) CAS# 4499-86-9
M/SDS  |  Datasheet [40 KB]