TMAH RECYCLE: MOBIUS SYSTEM™

SACHEM is committed to caring for the environment and efficient use of resources.
By combining our chemical mobius_for_webscience expertise and technology SACHEM has created
the Mobius System™, an innovative recycle technology. 

Removing tetramethylammonium hydroxide (TMAH) from waste streams used to be an expensive and inefficient process.  Large bio-treatment ponds were needed to handle the high COD and BOD demand it takes to break down TMAH waste - restricting a fab's capacity and space.  Shipping TMAH waste offsite for disposal was a costly and tedious alternative. 

With the Mobius System™ you will: 

Increase Your Capacity

  • Recover greater than 99% of TMAH back to high purity grade
  • Capture very dilute waste streams of TMAH and recycle on-site back to dilute developer or as concentrate.
  • Reduce or eliminate restrictions on bio-treatment and waste disposal caused by TMAH

Increase Safety

  • Isolate TMAH handling into a closed-loop system that reduces the number of times the chemical is managed, especially at high concentrations

Save Money

  • Eliminate cost of disposal
  • Lower the total cost for lithography developing
  • Reduce transportation costs

Reduce Water Consumption

  • Recycle a minimum of 85% of the water lost in developer systems 

Go Green

  • Reduce carbon footprint by reusing an organic molecule many times over
  • Reduce the carbon emissions associated with manufacturing and transporting
    virgin TMAH.

Tests prove that developers made from the SACHEM Mobius System™ perform as well as developers made from virgin TMAH. 

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