TMAH RECYCLE: MOBIUS SYSTEM™

SACHEM is committed to caring for the environment and efficient use of resources.
By combining our chemical mobius_for_webscience expertise and technology SACHEM has created
the
Mobius System™, an innovative recycle technology.

Recycling tetramethylammonium hydroxide (TMAH) used to be an expensive and inefficient process.  Large bio-treatment ponds were needed to handle the high COD and BOD demand it takes to break down TMAH waste – restricting a fab’s capacity and space.  And shipping TMAH waste offsite for disposal was a costly and tedious alternative. 

But now there’s a better way. 

Ideal for TFT/LCD production, the SACHEM Mobius System ™ represents a huge leap forward to TMAH recycling technology. 

With the Mobius System™ you will:
 

Increase Your Capacity
·         recover up to 99.95% of TMAH back to high purity grade
·         capture very dilute waste streams of TMAH and recycles on-site back to developer or as
          concentrate.
·         eliminate restrictions on bio-treatment or waste disposal caused by TMAH 

Save Money
·         eliminate cost of disposal
·         lower the total cost for lithography developing
·         reduce transportation costs 

Reduce Water Consumption
·         recycle a minimum of 85% of the water lost in developer systems 

Go Green
·         reduce carbon footprint by resuing an organic molecule many times over
·         reduce the carbon emissions associated with manufacturing and transporting
          virgin TMAH 

Tests prove that developers made from the SACHEM Mobius System ™ perform as well as developers made from virgin TMAH. 

Contact us at This email address is being protected from spam bots, you need Javascript enabled to view it for additional information regarding ways SACHEM can bring value to your lithography developer process system.