SACHEM SelectEtch SE-1300™ series selectively etch new materials such as Ruthenium. Our SE-1300 series products are effective alternatives to standard etchants, such as CAN.  Our products offer outstanding selectivity and purity.

Ruthenium Etch
SelectEtch™ SE-1310 Ruthenium Wet Etchant

• Fast Ruthenium etch rate
• Selective to High-k and RuOxide
• Dilute aqueous solution
• Low surface contamination 

 Industry standard is Cerric Ammonium Nitrate (CAN) which causes high metallic contamination.  SelectEtch^™ SE-1310 is designed for selective removal of Ruthenium metal, especially in FEOL metal gate applications and BEOL Cu barrier layer applications.

SelectEtch™ SE-1310 is designed for selective removal of Ruthenium metal, especially in FEOL metal gate applications and BEOL Cu barrier layer applications.

HfSiON Thickness Change @45 C

*- indicates loss +indicates gain