FRONT END OF LINE (FEOL) CHEMISTRY

Front End of Line (FEOL) Experts with selective. intelligent. chemistry.

Advanced technology nodes are posing critical challenges to Front End wet cleaning and surface preparation engineers, including:

• Reduced silicon and oxide loss budgets (<1 A per cleaning step)
• New materials of construction for features and contacts
• Increasing concern over cleaning effects on plasma-damaged films

SACHEM has the critical technology base and competancies to address the challenges posed by the "wave" of new materials and device complexity in FEOL applications.  Our solutions approach is integrated with the specific capabilities of advanced Front End wet clean and surface preparation tools. 


PRODUCT CATEGORIES

Oxide Etchants
Advanced Contact Cleaners
Silicon Etchants